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Xuedong Liu
Xuedong Liu
ASML Holding
Throughput
Computer science
Extreme ultraviolet lithography
Electronic engineering
Beam (structure)
5
Papers
7
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Multi-beam Inspection (MBI) development progress and applications
2020
Eric Ma
Weiming Ren
Xinan Luo
Shuo Zhao
Xuerang Hu
Xuedong Liu
Chiyan Kuan
Kevin Chou
Martijn Maassen
Weihua Yin
Aiden Chen
Niladri Sen
Martin Ebert
Lei Liu
Fei Wang
Oliver D. Patterson
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Multiple beam inspection (MBI) for 7nm node and beyond: technologies and applications
2019
Eric Ma
Kevin Chou
Martin Ebert
Xuedong Liu
Weiming Ren
Xuerang Hu
Martijn Maassen
Weihua Yin
Aiden Chen
Fei Wang
Oliver D. Patterson
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Cutting edge multiple beam technology for EUV era: latest development progress and application
2018
Eric Ma
Kevin Chou
Xuedong Liu
Weiming Ren
Xuerang Hu
Fei Wang
Kevin Liu
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Holistic approach for overlay and edge placement error to meet the 5nm technology node requirements
2018
Jan Mulkens
Bram Slachter
Michael Kubis
Wim Tel
Paul Hinnen
Mark Maslow
Harm Dillen
Eric Ma
Kevin Chou
Xuedong Liu
Weiming Ren
Xuerang Hu
Fei Wang
Kevin Liu
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Multiple beam technology development and application for defect inspection on EUV wafer/mask
2018
Eric Ma
Kevin Chou
Xuedong Liu
Weiming Ren
Xuerang Hu
Fei Wang
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