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Kevin Liu
Kevin Liu
ASML Holding
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Electronic engineering
Computer science
Extreme ultraviolet lithography
Metrology
2
Papers
6
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Cutting edge multiple beam technology for EUV era: latest development progress and application
2018
Eric Ma
Kevin Chou
Xuedong Liu
Weiming Ren
Xuerang Hu
Fei Wang
Kevin Liu
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Holistic approach for overlay and edge placement error to meet the 5nm technology node requirements
2018
Jan Mulkens
Bram Slachter
Michael Kubis
Wim Tel
Paul Hinnen
Mark Maslow
Harm Dillen
Eric Ma
Kevin Chou
Xuedong Liu
Weiming Ren
Xuerang Hu
Fei Wang
Kevin Liu
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Citations (6)
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