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D. Collins
D. Collins
Applied Materials
Dielectric
Time-dependent gate oxide breakdown
Electronic engineering
Materials science
Capacitance
2
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3
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Ultrathin conformal multilayer SiNO dielectric cap for capacitance reduction in Cu/low k interconnects
2016
IITC | International Interconnect Technology Conference
Deepika Priyadarshini
Son Van Nguyen
Hosadurga Shobha
S. Cohen
Timothy M. Shaw
C. Parks
E. Adams
J. Burnham
E. Liniger
C.-K. Hu
D. Collins
Terry A. Spooner
Alfred Grill
D. Canaperi
Vamsi Paruchuri
Daniel C. Edelstein
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Optimizing ULK film properties to enable BEOL integration with TDDB reliability
2015
IITC | International Interconnect Technology Conference
E. Todd Ryan
Deepika Priyadarshini
Stephen M. Gates
Hosadurga Shobha
James Chen
Kumar Virwani
Anita Madan
E. Adams
Elbert E. Huang
E. Liniger
D. Collins
M. Stolfi
Kang Sub Yim
Alex Demos
Alfred Grill
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Citations (2)
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