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Wolfgang Lehnert
Wolfgang Lehnert
Materials science
Optoelectronics
Semiconductor device
Atomic layer deposition
Inorganic chemistry
5
Papers
20
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Dielectric material options for integrated capacitors
2014
ECS Journal of Solid State Science and Technology
Guenther Ruhl
Wolfgang Lehnert
M. Lukosius
Christian Wenger
Canan Baristiran Kaynak
Tom E. Blomberg
Suvi Haukka
Peter Baumann
W.F.A. Besling
Aarnoud L. Roest
Benoit Riou
Sandrine Lhostis
Aomar Halimaou
F. Roozeboom
E Erik Langereis
W.M.M. Kessels
Andy Zauner
S. Rushworth
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A method of processing a semiconductor device
2014
Wolfgang Lehnert
Michael Rogalli
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Semiconductor devices and semiconductor processing methods
2013
Wolfgang Lehnert
Michael Rogalli
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Compressing polycrystalline silicon layer and manufacturing method thereof
2012
Wolfgang Lehnert
Markus Meyer
Stefan Pompl
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Plasma enhanced atomic layer batch processing of aluminum doped titanium dioxide
2012
Journal of Vacuum Science and Technology
Wolfgang Lehnert
Guenther Ruhl
Alexander Gschwandtner
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Citations (14)
1