Old Web
English
Sign In
Acemap
>
authorDetail
>
Azuma Hisanobu
Azuma Hisanobu
Semiconductor device fabrication
Wafer
Materials science
Nanotechnology
Manufacturing engineering
2
Papers
0
Citations
0
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (2)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Nanoimprint Wafer and Mask Tool Progress and Status for High Volume Semiconductor Manufacturing
2016
Matsuoka Yoichi
Seki Junichi
Nakayama Takahiro
Nakagawa Kazuki
Azuma Hisanobu
Yamamoto Kiyohito
Sato Chiaki
Sakai Fumio
Takabayashi Yukio
Aghili Ali
Mizuno Makoto
Choi Jin
E Jones Chris
Show All
Source
Cite
Save
Citations (0)
Nanoimprint Wafer and Mask Tool Progress and Status for High Volume Semiconductor Manufacturing
2016
Matsuoka Yoichi
Seki Junichi
Nakayama Takahiro
Nakagawa Kazuki
Azuma Hisanobu
Yamamoto Kiyohito
Sato Chiaki
Sakai Fumio
Takabayashi Yukio
Aghili Ali
Mizuno Makoto
Choi Jin
E Jones Chris
Show All
Source
Cite
Save
Citations (0)
1