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Brad C. Bailey
Brad C. Bailey
Dow Chemical Company
Nanotechnology
X-ray lithography
Lithography
Photoresist
Resist
1
Papers
7
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Development of molecular resist derivatives for EUV lithography
2013
Proceedings of SPIE
D. Patrick Green
Vipul Jain
Brad C. Bailey
Michael Wagner
Michael B. Clark
David Valeri
Steve Lakso
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Citations (7)
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