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K. Gut
K. Gut
Centre national de la recherche scientifique
Mach–Zehnder interferometer
Microsystem
Architecture
In situ
Interferometry
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Integrated optomechanical sensor for in situ characterization of MEMS: the implementing of a readout architecture
2003
Christophe Gorecki
Andrei Sabac
P. Bey
K. Gut
Alain Jacobelli
Thierry Dean
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Citations (7)
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