Integrated optomechanical sensor for in situ characterization of MEMS: the implementing of a readout architecture

While testing electrical properties in microsystems is a well-developed art, the testing of mechanical properties of MEMS devices is not. There is a great need for techniques that will permit the evaluation of MEMS devices, in all stages of manufacturing, with respect to material and micromechanical properties. In this contribution we propose a new approach, based on the integrated optical read-out using a Mach-Zehnder interferometer, monolithically integrated into the PZT actuated membrane.