Chemical Vapor Deposition and Its Applications in Inorganic Synthesis

Chemical vapor deposition (CVD) is a technology of inorganic synthesis with a long history. It plays an important role even in modern science. The key process of the Nobel Prize in Physics 2014 for blue light-emitting diodes was the CVD gallium nitride epitaxial growth. With the development of integrated circuits, a technology of hot-wall low-pressure CVD, together with its simulation model, had been used since the 1970s. The success of CVD diamond syntheses under low pressure broke through an about 150-year stagnation of the thermodynamics discipline from its classical stage into modern thermodynamics. CVD diamond synthesis is a touchstone in the modern science. The whole macroscopic world (i.e., Nature excluding the universe, black hole, etc.) develops following the energy dissipation and dissipation minimization law with an ideal limitation of nondissipation, i.e., the second law of modern thermodynamics.