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Holistic Integrated Process Solutions for Patterning Phase Change Memory Devices
Holistic Integrated Process Solutions for Patterning Phase Change Memory Devices
2021
John Hoang
Meihua Shen
Thorsten Lill
Danna Qian
Aaron Routzahn
Jack Kun-Chieh Chen
Nick Altieri
Anthony Yu
Dulkin Alexander
Jim Sims
Andrew John Mckerrow
Rafal Dylewicz
Keywords:
Phase-change memory
Computer science
Process (computing)
Computer architecture
Correction
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