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Aaron Routzahn
Aaron Routzahn
Lithography
Materials science
Nanosphere lithography
Nanostructure
Nanotechnology
4
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11
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Holistic Integrated Process Solutions for Patterning Phase Change Memory Devices
2021
John Hoang
Meihua Shen
Thorsten Lill
Danna Qian
Aaron Routzahn
Jack Kun-Chieh Chen
Nick Altieri
Anthony Yu
Dulkin Alexander
Jim Sims
Andrew John Mckerrow
Rafal Dylewicz
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Isotropic Atomic Layer Etching in High Aspect Ratio Structures
2021
Andreas Fischer
Paul Lemaire
Aaron Routzahn
Thorsten Lill
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Geometrically Structured Dynamic Shadowing Lithography: Structural Growth and Control
2012
Bulletin of the American Physical Society
Shengrong Ye
Aaron Routzahn
R. Lloyd Carroll
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Fabrication of 3D metal dot arrays by geometrically structured dynamic shadowing lithography.
2011
Langmuir
Shengrong Ye
Aaron Routzahn
R. Lloyd Carroll
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Citations (11)
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