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Aluminum Nanowire Arrays via Soft Nanoimprint Lithography
Aluminum Nanowire Arrays via Soft Nanoimprint Lithography
2017
Michael J. Naughton
Nathan T. Nesbitt
Juan M. Merlo
Aaron H. Rose
Yitzi M. Calm
Luke D'Imperio
Dave T. Courtney
Steve Shepard
Krzysztof Kempa
Michael J. Burns
Keywords:
Nanoimprint lithography
Nanowire
Next-generation lithography
Nanotechnology
Multilayer soft lithography
Materials science
Aluminium
Optoelectronics
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