Monitoring of conditions inside gas aggregation cluster source during production of Ti/TiOx nanoparticles

Gas aggregation sources are nowadays rather widely used in the research community for producing nanoparticles. However, the direct diagnostics of conditions inside the source are relatively scarce. In this work, we focused on monitoring the plasma parameters and the composition of the gas during the production of the TiOx nanoparticles. We studied the role of oxygen in the aggregation process and the influence of the presence of the particles on the plasma. The construction of the source allowed us to make a 2D map of the plasma parameters inside the source.