Suppression of growth domains in epitaxial ZnO films on structured (0001) sapphire surface

Zinc oxide layers have been grown by magnetron sputtering in an oxygen atmosphere on structured sapphire surfaces. The formation of ZnO islands oriented in two directions (the so-called domains) was observed on (0001) Al2O3 surfaces with steps spaced by a distance from several thousands to several tens of thousands of nanometers. The islands formed along steps on (0001) Al2O3 surfaces with an ordered terrace-step structure (and, subsequently, ZnO films) have only one orientation. Another method is proposed for suppressing domains during ZnO growth on (0001) Al2O3 d.