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Measurement of Nitrogen Concentration in Cz Silicon Crystals
Measurement of Nitrogen Concentration in Cz Silicon Crystals
2003
Naohisa Inoue
A. Hashimoto
K. Shingu
K. Masumoto
Keywords:
Radiochemistry
Nitrogen
Infrared spectroscopy
Monocrystalline silicon
Inorganic chemistry
Materials science
Silicon
Charged particle
Crystal
Chemical engineering
Metallurgy
cz silicon
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