Monolayer Graphene Grown on Nanoscale Pt films Deposited on TiO2 substrates for Micro and Nanoelectromechanical Systems

Joon Hyong Cho,Yoonho Seo,Andrei Dolocan,Neal A. Hall,Michael Cullinan

Monolayer Graphene Grown on Nanoscale Pt films Deposited on TiO2 substrates for Micro and Nanoelectromechanical Systems

2020

Joon Hyong Cho
Yoonho Seo
Andrei Dolocan
Neal A. Hall
Michael Cullinan

This study presents chemical vapor deposition (CVD) growth of high-quality monolayer graphene on 100 nm-thick Pt thin films deposited on TiO2-coated silicon wafers. Conventional graphene growth on ...

Keywords:

Nanoscopic scale
Nanoelectromechanical systems
monolayer graphene
Materials science
Nanotechnology

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