Old Web
English
Sign In
Acemap
>
Paper
>
Metastable and stable transistion-metal silicide layer formation in Si and SiGe
Metastable and stable transistion-metal silicide layer formation in Si and SiGe
1999
I. Dézsi
Cs. Fetzer
Eckhard Bill
Matty Caymax
Hugo Pattyn
Sven Degroote
Guido Langouche
André Vantomme
Keywords:
Metastability
Silicide
Metal
Inorganic chemistry
Materials science
metal silicide
Chemical engineering
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]