Apparatus and methods for moving fluids in wet chemical processes of microstructure workpieces

Reactor (100, 200, 700) with fluid movement for a treatment of a workpiece (W) in a treatment zone, provided with: - a vessel (112, 212, 712) having a flow system, which is designed to allow flow of the treatment liquid in the vessel (112, 212, 712) align, - a mover (130, 330, 630a-l) having a base portion (132, 332, 632), and a plurality of specific structures, which are away from each other along the base part (132, 332, 632) for moving individual rooms to form, opposite the treatment zone (Z) are open, and - a movement means (140) coupled with the agitator (130, 330, 630a-l) to the base part (132, 332, 632), and the specific structures along the surface of the workpiece (W) to move.