In situ electrical characterization of YxTiy getter thin films during thermal activation

Transition metals alloys are the most studied getter films for wafer-level vacuum packaging of MEMS. In this work we investigated yttrium and YxTiy alloys films that could possibly overcome the limitations of usual getter materials, i.e. reversible sorption of hydrogen and low sorption ability for hydrocarbon gases. As a preliminary step towards this objective, properties of (co-)evaporated yttrium and YxTiy films were analyzed by SEM, EDS, XPS and in-situ sheet resistance measurements before, after and/or during annealing in vacuum. As deposited and annealed films have a small grain size and a columnar structure. It is shown that yttrium and YxTiy films can be activated after 1 hour of annealing in vacuum at 250 °C if the Y-content is larger than ~9 %. These results are promising for the use of Y-based films as low temperature getters for vacuum packaging.