10.2: High‐Performance Barrier Films for Flexible Organic Display and Lighting Applications

The key requirement in manufacturing flexible organic lightemitting displays (OLEDs) is to protect the deposited electrodes and emitter materials from oxygen and moisture permeation. Multilayered organic/inorganic barrier films can get relatively thick and brittle, and thinner, intrinsically flexible barrier films need to be developed. In this study, we have investigated manufacturing multilayered sol-gel/atomic layer deposition (ALD) structures on poly(ethylene naphthalate) films. The results show improved surface morphology and promising shielding properties against water vapor and oxygen permeation.