One-step Preparation of BaTiO3 Nanoparticles by Liquid Source Chemical Vapor Deposition

Barium titanate (BaTiO3) nanoparticles were prepared by means of a liquid source chemical vapor deposition method under atmospheric pressure. The effects of precursor composition, concentration, operating temperature, and residence time in the hot zone on the surface morphology, composition, and crystallinity of the resulting particles were investigated. By increasing the Ba/Ti ratio in the precursor, the amount of TiO2 particles tended to decrease, while the amount of barium carbonate (BaCO3) particles increased. By decreasing the precursor concentration or the residence time in the hot zone, both particle size and degree of aggregation of the particles produced decreased, but the amount of barium carbonate increased. At a Ba/Ti ratio of 2.3, spherical and highly crystalline cubic BaTiO3 particles 27 nm in size with a narrow size distribution (σg = 1.33) were produced at 900°C.