Old Web
English
Sign In
Acemap
>
Paper
>
Preferential Orientation Controle of Crystallites in DC Reactive Sputtered AlN Films
Preferential Orientation Controle of Crystallites in DC Reactive Sputtered AlN Films
2000
A. Mahmood
Stephen Muhl
Luis Enrique Sansores
Eduardo Andrade
Keywords:
Crystallite
Chemical engineering
Materials science
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]