The Twins Structure, Electrical Properties and Cell Performance of Magnetron Sputtering Deposited Chlorine Doped CdTe

We studied the twins structure, optical properties, electrical properties and cell performance of chlorine doped CdTe (CdTe:Cl) polycrystalline film deposited by magnetron sputtering. Serried twins structure consisting of only several atomic layers can be found in both as-deposited CdTe:Cl and CdTe:Cl with annealing. Relatively heavy chlorine doping by magnetron sputtering may also cause rapid donor-acceptor pair (DAP) recombination. These cause the series resistance of CdTe:Cl film to be too high compared to undoped CdTe film with CdCl 2 treatment.