Synthesis of Silicon-Carbide Nanoparticles by the Laser Pyrolysis of a Mixture of Monosilane and Acetylene

The conditions of the laser-stimulated synthesis reaction of silicon-carbide nanoparticles are determined and their characterization is performed. The laser synthesis reaction of SiC particles in the gas phase is observed with the SiH4/C2H2 flow ratio in the range of 1.6–3.2. The temperature in the reaction-zone region is ~1400–1500°C. Silicon-carbide nanoparticles ~6 nm in diameter are fabricated and their composition is investigated.