Old Web
English
Sign In
Acemap
>
Paper
>
Ruthenium Based Nanoscale Contact Coatings for Magnetically Controlled MEMS Switches
Ruthenium Based Nanoscale Contact Coatings for Magnetically Controlled MEMS Switches
2019
Sergey M. Karabanov
Dmitry V. Suvorov
Keywords:
Materials science
Composite material
Nanoscopic scale
Nanotechnology
Microelectromechanical systems
Ruthenium
Contact resistance
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]