Stick-to-Analyze Zeta Potential Measurement Chip with Integrated Electroosmotic Micropump and Liquid Flow Sensor

A novel world smallest fully-integrated zeta potential measurement sensor is realized: we fabricated, for the first time, an integrated electroosmotic flow (EOF) micro pump with micro flow sensor in an open micro-channel on an $8\times 8\ \mathrm{mm}^{2}$ SOI chip. The sensor allows us to measure surface property (zeta potential) of planar material. Due to its noninvasive measurement, the analyzed wafer can further be MEMS-processed to realize microfluidic devices with a well-identified surface electrical property.