Thermal and optical properties of sol-gel and SU-8 resists
2012
We report on a combined differential scanning calorimetric (DSC) and Raman scattering study of thermal
polymerization of sol-gel organic-inorganic SZ2080 and SU-8 resists. In SZ2080, endothermic peak at 95°C
signify drying of the resist and justifies the required pre-bake at around 100°C for 1-2 h for the best performance
during femtosecond (fs-)direct laser writing. A strong exothermic peak at 140°C (under 2 K/min heating rate)
completes polymerization of the resist. It is revealed that 1wt% of photoinitiators change Raman scattering
intensity of SZ2080 and can contribute efficiently to heating and cross-linking of photo-polymers. In the case
of SU-8, a 65°C DSC feature related to solvent evaporation was observed. The strongest changes in Raman
spectrum occurs at a narrow 895 cm -1 band which is linked to polymerization. Raman scattering taken during
DSC revealed spectral changes following the polymerization; an applicability of this method for monitoring photopolymerization
induced by ultra-fast laser sources and feasibility of a laser-modulated calorimetry is discussed.
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