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Low-temperature pre-epitaxy surface cleaning of Si and SiGe
Low-temperature pre-epitaxy surface cleaning of Si and SiGe
2015
Harald Profijt
Samuel Suhard
Erik Rosseel
John Tolle
Hans Mertens
Sathish Kumar Dhayalan
Andriy Hikavyy
Doran Weeks
Frank Holsteyns
Roger Loo
Sandeep Mehta
Jan Willem Maes
Keywords:
Epitaxy
Analytical chemistry
Materials science
surface cleaning
Optoelectronics
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