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OXYGEN INFLUENCE ON THE PHASE COMPOSITION AND ELECTRICAL PROPERTIES OF SIPOS FILMS
OXYGEN INFLUENCE ON THE PHASE COMPOSITION AND ELECTRICAL PROPERTIES OF SIPOS FILMS
2020
V. A. Terekhov
Konstantin A. Barkov
Dmitry Nesterov
Anatoliy I. Popov
Aleksey D. Barinov
Pavel Seredin
Dmitry Goloshchapov
Igor E. Zanin
Sergey A Ivkov
E. P. Domashevskaya
A. T. Kozakov
Anatolii V. Nicolskii
Keywords:
Materials science
phase composition
Oxygen
Chemical engineering
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