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Aleksey D. Barinov
Aleksey D. Barinov
Moscow Power Engineering Institute
Materials science
Oxygen
Raman spectroscopy
Activation energy
Crystallite
2
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Bound oxygen influence on the phase composition and electrical properties of semi-insulating silicon films
2021
Materials Science in Semiconductor Processing
V. A. Terekhov
Dmitriy N. Nesterov
Konstantin A. Barkov
E. P. Domashevskaya
Aleksandr V. Konovalov
Yuriy L. Fomenko
Pavel Seredin
D. L. Goloshchapov
Anatoliy I. Popov
Aleksey D. Barinov
Vyacheslav M. Andreeshchev
Igor E. Zanin
Sergey A Ivkov
Oksana E. Loktionova
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OXYGEN INFLUENCE ON THE PHASE COMPOSITION AND ELECTRICAL PROPERTIES OF SIPOS FILMS
2020
V. A. Terekhov
Konstantin A. Barkov
Dmitry Nesterov
Anatoliy I. Popov
Aleksey D. Barinov
Pavel Seredin
Dmitry Goloshchapov
Igor E. Zanin
Sergey A Ivkov
E. P. Domashevskaya
A. T. Kozakov
Anatolii V. Nicolskii
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