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Metal CVD Technology for ULSI Applications: The Aluminum Route
Metal CVD Technology for ULSI Applications: The Aluminum Route
1996
Andreas Knorr
Jonathan Faltermeier
Robert Talevi
Heidi Gundlach
Kaushik Kumar
Gregory G. Peterson
Alain E. Kaloyeros
Keywords:
Nanotechnology
Aluminium
Materials science
Metal
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