NEMS Sensors Based on Suspended Graphene

Graphene has exciting potential in nanoelectromechanical system (NEMS) applications due to its unique mechanical and electrical properties as well as its ultimate thinness. In this paper, we discuss the potential of using suspended graphene structures in NEMS sensors and provide an overview of our previous research results on piezoresistive graphene NEMS sensors, including pressure sensors and accelerometers.