Selective Functionalization of Tailored

The controlled positioning of nanostructures with active molecular components is of importance throughout nanoscience and nanotechnology. We present a novel three-step method to produce nanostructures that are selectively decorated with functional molecules. We use fluorophores and nanoparticles to functionalize SiO features with defined shapes and with sizes ranging from micrometers to 25 nm. The method is called MACE-ID: molecular assemblycontrolledbyelectron-beam-induced deposition.Inthe firststep,SiOnanostructures are written with focused electron-beam-induced deposition, a direct-writing technique. In the second step, the deposits are selectively silanized. In the final step, the silanes are functionalized with fluorescent dyes, polystyrene spheres, or gold nanoparticles. This recipe gives exciting new possibilities for combining the highly accurate control of top-down patterning (e-beam direct writing) with the rich variety of the bottom-up approach (selfassembly),leadingtoactiveorresponsivesurfaces.AnimportantadvantageofMACE-IDisthat it can be used on substrates that already contain complex features, such as plasmonic structures, nanoantennas, and cavities.