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Nano-crystalline graphite coated SOI NEMS switches
Nano-crystalline graphite coated SOI NEMS switches
2016
L. Boodhoo
Sunil Rana
J.D. Reynolds
Yoshishige Tsuchiya
W. Redman-White
S H Pu
H. Mitzuta
Dinesh Pamunuwa
Harold Chong
Keywords:
Nanoelectromechanical systems
Graphite
Silicon on insulator
Nano-
Crystal
Composite material
Materials science
nano crystalline
Nanotechnology
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