Impact of H‐Uptake from Forming Gas Annealing and Ion Implantation on the Photoluminescence of Si Nanoparticles
2018
Silicon nanoparticles (SiNPs) are formed by implanting 70keV Si+ into a SiO2-film and subsequent thermal annealing. SiNP samples are further annealed in forming gas. Another group of samples contai ...
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