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(PE)ALD TaCN film nucleation and growth on TiNx: influence of nitrogen content
(PE)ALD TaCN film nucleation and growth on TiNx: influence of nitrogen content
2013
Fabien Piallat
R. Gassilloud
Bernard Pelissier
Cédric Leroux
Pierre Caubet
Corentin Vallée
Keywords:
Chemical engineering
Nitrogen
Materials science
Nucleation
Correction
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