Epitaxy of ZnO Films on the (0001) Surface of Crystalline Substrates of Lanthanum–Magnesium Hexaaluminate LaMgAl11O19

The morphology and structure of heteroepitaxial ZnO films deposited on the (0001) surface of crystalline substrates of lanthanum–magnesium hexaaluminate LaMgAl11O19 by magnetron sputtering have been investigated by electron microscopy, probe microscopy, X-ray diffraction (XRD) analysis, and electron diffraction analysis. It is established that the structure of these ZnO films is more perfect than that of the films on (0001) sapphire substrates (including those containing a buffer aluminum nitride layer).