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Reduction of Interface State Density in the SiC MOS Structures by a Non-oxidation Process
Reduction of Interface State Density in the SiC MOS Structures by a Non-oxidation Process
2021
Tsunenobu Kimoto
Keita Tachiki
Takuma Kobayashi
Yu-ichiro Matsushita
Keywords:
Interface (Java)
Chemical engineering
Materials science
Reduction (complexity)
oxidation process
state density
Correction
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