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Abhinav Pathak
Abhinav Pathak
IMEC
Lithography
Extreme ultraviolet lithography
Skew
Process window
Critical dimension
2
Papers
4
Citations
0
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2024
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Impact of local variability on defect-aware process windows
2019
Mark Maslow
Hidetami Yaegashi
Andreas Frommhold
Guido Schiffelers
Felix Wahlisch
Gijsbert Rispens
Bram Slachter
Keisuke Yoshida
Arisa Hara
Noriaki Oikawa
Abhinav Pathak
Dorin Cerbu
Eric Hendrickx
Joost Bekaert
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Citations (2)
Impact of sequential infiltration synthesis (SIS) on roughness and stochastic nano-failures for EUVL patterning
2019
Pieter Vanelderen
Victor Blanco
Ming Mao
Yoann Tomczak
David De Roest
Nicola Kissoon
Paulina Rincon-Delgadillo
Gijsbert Rispens
Guido Schiffelers
Abhinav Pathak
Frederic Lazzarino
Danilo De Simone
Etienne de Poortere
Moyra McManus
Daniele Piumi
Eric Hendrickx
Geert Vandenberghe
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Citations (2)
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