Old Web
English
Sign In
Acemap
>
authorDetail
>
Dorin Cerbu
Dorin Cerbu
IMEC
Computer science
Extreme ultraviolet lithography
Process window
Lithography
Metrology
5
Papers
5
Citations
0.00
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (5)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Unsupervised machine learning based CD-SEM image segregator for OPC and process window estimation
2020
Bappaditya Dey
Dorin Cerbu
Kasem Khalil
Sandip Halder
Philippe Leray
Sayantan Das
S. M. Yasser Sherazi
Magdy Bayoumi
Ryoung-Han Kim
Show All
Source
Cite
Save
Citations (0)
Impact of local variability on defect-aware process windows
2019
Mark Maslow
Hidetami Yaegashi
Andreas Frommhold
Guido Schiffelers
Felix Wahlisch
Gijsbert Rispens
Bram Slachter
Keisuke Yoshida
Arisa Hara
Noriaki Oikawa
Abhinav Pathak
Dorin Cerbu
Eric Hendrickx
Joost Bekaert
Show All
Source
Cite
Save
Citations (2)
Predicting stochastic defects across the process window (Conference Presentation)
2019
Andreas Frommhold
Dorin Cerbu
Joost Bekaert
Lieve Van Look
Mark John Maslow
Gijsbert Rispens
Eric Hendrickx
Show All
Source
Cite
Save
Citations (2)
Deep-learning-based SEM image denoiser (Conference Presentation)
2019
Dorin Cerbu
Sandip Halder
Philippe Leray
Show All
Source
Cite
Save
Citations (0)
Review-SEM image analysis with K-means algorithm: AM: Advanced metrology/DI: Defect inspection
2018
ASMC | Advanced Semiconductor Manufacturing Conference
Sandip Halder
Dorin Cerbu
Mohamed Saib
Philippe Leray
Show All
Source
Cite
Save
Citations (1)
1