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Alexander Dr. Geier
Alexander Dr. Geier
Electric discharge in gases
Extreme ultraviolet lithography
Optics
Materials science
Electrode
5
Papers
20
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EUV radiation source of high radiation capacity on the basis of a gas discharge.
2006
Juergen Kleinschmidt
Jens Ringling
Alexander Dr. Geier
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Arrangement for generating EUV radiation, based on a gas discharge plasma
2006
Harald Ebel
Alexander Dr. Geier
Sven Götze
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EUV radiation source having a high radiation power based on a gas discharge
2005
Alexander Dr. Geier
Jürgen Dr. Kleinschmidt
Jens Ringling
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EUV sources for EUV lithography in alpha-, beta-, and high volume chip manufacturing: an update on GDPP and LPP technology
2005
Uwe Stamm
Jürgen Dr. Kleinschmidt
Kai Dr. Gäbel
Guido Hergenhan
C Ziener
Guido Schriever
Imtiaz Ahmad
Denis Bolshukhin
Jesko Brudermann
R. de Bruijn
T. D. Chin
Alexander Dr. Geier
Sven Götze
Alexander Keller
Vladimir Korobotchko
Björn Mader
Jens Ringling
T. Brauner
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Development status of gas discharge produced plasma Z-pinch EUV sources for use in beta-tools and high volume chip manufacturing tools
2005
Uwe Stamm
Jürgen Dr. Kleinschmidt
Kai Dr. Gäbel
Guido Hergenhan
C Ziener
Imtiaz Ahmad
Denis Bolshukhin
Vladimir Korobotchko
Alexander Keller
Alexander Dr. Geier
Jens Ringling
Chinh Duc Tran
Björn Mader
R. de Bruijn
Sven Götze
Jesko Brudermann
Guido Schriever
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Citations (5)
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