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Nicolai Petrov
Nicolai Petrov
GlobalFoundries
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Resolution (logic)
Aerial image
Computer vision
Process variation
2
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Integration of Metallization Processes in Robust Interconnects Formation for 14 nm Nodes and beyond
2018
IITC | International Interconnect Technology Conference
Nicolai Petrov
Shao Beng Law
Jonathan Rullan
Seungman Choi
San Leong Liew
Han Wah Ng
Shinichiro Kakita
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Aerial image ORC checks and their correlation to wafer-edge yield limitation for metals: a study and an OPC resolution
2017
Tamer Desouky
Yixiao Zhang
Mark Terry
Haizhou Yin
Muhammed Pallachali
Nicolai Petrov
Teck Jung Tang
Fadi Batarseh
Ahmed Khalil
Pietro Babighian
Rohan Deshpande
Deborah Ryan
Rao Desineni
Shweta Shokale
Feng Wang
Sang-Kee Eah
Jiechang Hou
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