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Tooru Koike
Tooru Koike
Toshiba
Extreme ultraviolet
Mask inspection
Optics
Engineering
Extreme ultraviolet lithography
2
Papers
28
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Performance of EBeyeM for EUV Mask Inspection
2011
Shinji Yamaguchi
Masato Naka
Takashi Hirano
Masamitsu Itoh
Motoki Kadowaki
Tooru Koike
Yuichiro Yamazaki
Kenji Terao
Masahiro Hatakeyama
Kenji Watanabe
Hiroshi Sobukawa
Takeshi Murakami
Tsutomu Karimata
Kiwamu Tsukamoto
Takehide Hayashi
Ryo Tajima
Norio Kimura
Naoya Hayashi
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Citations (18)
Development of EB inspection system EBeyeM for EUV mask
2010
Takashi Hirano
Shinji Yamaguchi
Masato Naka
Masamitsu Itoh
Motoki Kadowaki
Tooru Koike
Yuuichiro Yamazaki
Kenji Terao
Masahiro Hatakeyama
Hiroshi Sobukawa
Takeshi Murakami
Kiwamu Tsukamoto
Takehide Hayashi
Kenji Watanabe
Norio Kimura
Naoya Hayashi
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Citations (10)
1