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Takehide Hayashi
Takehide Hayashi
Ebara Corporation
Extreme ultraviolet
Mask inspection
Optics
Engineering
Extreme ultraviolet lithography
5
Papers
31
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Capability of particle inspection on patterned EUV mask using model EBEYE M
2014
Masato Naka
Ryoji Yoshikawa
Shinji Yamaguchi
Takashi Hirano
Masamitsu Itoh
Kenji Terao
Masahiro Hatakeyama
Kenji Watanabe
Hiroshi Sobukawa
Takeshi Murakami
Kiwamu Tsukamoto
Takehide Hayashi
Ryo Tajima
Norio Kimura
Naoya Hayashi
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Capability of model EBEYE M for EUV mask production
2012
Masato Naka
Shinji Yamaguchi
Motoki Kadowaki
Toru Koike
Takashi Hirano
Masamitsu Itoh
Yuichiro Yamazaki
Kenji Terao
Masahiro Hatakeyama
Kenji Watanabe
Hiroshi Sobukawa
Takeshi Murakami
Kiwamu Tsukamoto
Takehide Hayashi
Ryo Tajima
Norio Kimura
Naoya Hayashi
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Citations (2)
Performance of EBeyeM for EUV Mask Inspection
2011
Shinji Yamaguchi
Masato Naka
Takashi Hirano
Masamitsu Itoh
Motoki Kadowaki
Tooru Koike
Yuichiro Yamazaki
Kenji Terao
Masahiro Hatakeyama
Kenji Watanabe
Hiroshi Sobukawa
Takeshi Murakami
Tsutomu Karimata
Kiwamu Tsukamoto
Takehide Hayashi
Ryo Tajima
Norio Kimura
Naoya Hayashi
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Citations (18)
Development of EB inspection system EBeyeM for EUV mask
2010
Takashi Hirano
Shinji Yamaguchi
Masato Naka
Masamitsu Itoh
Motoki Kadowaki
Tooru Koike
Yuuichiro Yamazaki
Kenji Terao
Masahiro Hatakeyama
Hiroshi Sobukawa
Takeshi Murakami
Kiwamu Tsukamoto
Takehide Hayashi
Kenji Watanabe
Norio Kimura
Naoya Hayashi
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Citations (10)
半導体自動搬送対応efem(密閉容器からウエハーを出し入れし、製造装置に供給、回収する装置)用foup(密閉容器)移載ロボット
2001
Takehide Hayashi
takehide hayasi
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