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Vijay Vaniapura
Vijay Vaniapura
Mattson Technology, Inc.
Analytical chemistry
Substrate (chemistry)
Engineering
STRIPS
Plasma
5
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Inductive Coupled Downstream Plasma CD Trim Process Stability Study
2019
CSTIC | China Semiconductor Technology International Conference
Yali Fu
Shawming Ma
Yi Wang
Linda Sui
Lu Chen
Vijay Vaniapura
Li Diao
Mingjie Jiao
Hongwei Chen
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Study of downstream CF 4 contained plasma process impact on chamber condition
2018
CSTIC | China Semiconductor Technology International Conference
Yali Fu
Shawming Ma
Yi Wang
Ken Wang
Mingjie Jiao
Nancy Zhang
Vijay Vaniapura
HaiAu PhanVu
Bob Elliston
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Validation of High Efficiency ICP Source performance for advanced resist ashing
2015
ASMC | Advanced Semiconductor Manufacturing Conference
Vladimir Nagorny
Vijay Vaniapura
Vijay Surla
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Defect Free HDIS Process for Sub 28nm HKMG Using Reducing Chemistry
2014
Li Diao
Xiaoying Meng
Qiuhua Han
Haiyang Zhang
Robert George Elliston
HaiAu PhanVu
Vijay Vaniapura
Nancy Zhang
Keith Zhou
Christopher Lee
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Novel process strategies for strip over tin
2013
ASMC | Advanced Semiconductor Manufacturing Conference
Li Diao
Vijay Vaniapura
Robert Mueller
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