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Li Diao
Li Diao
Mattson Technology, Inc.
Metal gate
Materials science
Optoelectronics
Chemistry
Substrate (chemistry)
4
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Inductive Coupled Downstream Plasma CD Trim Process Stability Study
2019
CSTIC | China Semiconductor Technology International Conference
Yali Fu
Shawming Ma
Yi Wang
Linda Sui
Lu Chen
Vijay Vaniapura
Li Diao
Mingjie Jiao
Hongwei Chen
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Defect Free HDIS Process for Sub 28nm HKMG Using Reducing Chemistry
2014
Li Diao
Xiaoying Meng
Qiuhua Han
Haiyang Zhang
Robert George Elliston
HaiAu PhanVu
Vijay Vaniapura
Nancy Zhang
Keith Zhou
Christopher Lee
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Novel process strategies for strip over tin
2013
ASMC | Advanced Semiconductor Manufacturing Conference
Li Diao
Vijay Vaniapura
Robert Mueller
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Novel Strip Process Strategy for Metal Gate
2012
CSTIC | China Semiconductor Technology International Conference
Li Diao
Stephen Ross
Bob Elliston
Li Hou
Andreas Kadavanich
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