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Steve Sergi
Steve Sergi
Ion implantation
Process engineering
Nanotechnology
Radiochemistry
Oxygen
2
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2
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Source and beam performance improvement for carbon implantation with carbon monoxide (CO) gas
2012
Ying Tang
Barry Lewis Chambers
Sharad Yedave
Steve Sergi
Joseph D. Sweeney
Joseph R. Despres
Steve Bishop
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Optimization of Xenon Difluoride Vapor Delivery
2008
Joseph D. Sweeney
Paul J. Marganski
Robert Kaim
Mike Wodjenski
John Gregg
Sharad Yedave
Steve Sergi
Steve Bishop
David Eldridge
Peng Zou
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