Old Web
English
Sign In
Acemap
>
authorDetail
>
P. Ma
P. Ma
Applied Materials
Metal gate
Electronic engineering
Physics
Logic gate
Very-large-scale integration
2
Papers
23
Citations
0.00
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (2)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Highly conductive metal gate fill integration solution for extremely scaled RMG stack for 5 nm & beyond
2017
IEDM | International Electron Devices Meeting
N. Yoshida
Sajjad Hassan
W. Tang
Yixiong Yang
W. Zhang
S. C. Chen
L. Dong
Hongwen Zhou
Miao Jin
Motoya Okazaki
J. Park
N. Bekiaris
Raymond Hung
Jie Zhou
Y. Lei
P. Ma
X. Tang
T. Miyashita
Nam Sung Kim
E. Yieh
Show All
Source
Cite
Save
Citations (8)
Plasma enhanced atomic layer deposition of copper: A comparison of precursors
2013
Surface & Coatings Technology
Dirk J. Hagen
J. Connolly
Roger Nagle
Ian M. Povey
Simon A. Rushworth
Patrick B. Carolan
P. Ma
Martyn E. Pemble
Show All
Source
Cite
Save
Citations (15)
1