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Farzin Mirzaagha
Farzin Mirzaagha
KLA-Tencor
Engineering
Reticle
Reliability engineering
Engineering drawing
Photolithography
4
Papers
9
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Inspection results for 32nm logic and sub-50nm half-pitch memory reticles using the TeraScanHR
2007
Jean-Paul Sier
William H. Broadbent
Farzin Mirzaagha
Paul Yu
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Citations (1)
A Cost Model Comparing the Economics of Reticle Requalification Methods in Advanced Wafer fabs
2007
ASMC | Advanced Semiconductor Manufacturing Conference
Kaustuve Bhattacharyya
Doug Sutherland
Viral Hazari
Farzin Mirzaagha
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High-resolution mask inspection in advanced fab
2006
Stephanie Maelzer
Andre Poock
Bryan Reese
Kaustuve Bhattacharyya
Farzin Mirzaagha
Stephen Cox
Michael Lang
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Process window impact of progressive mask defects, its inspection and disposition techniques (go / no-go criteria) via a lithographic detector
2005
Jerry Huang
Lan-Hsin Peng
Chih Wei Chu
Kaustuve Bhattacharyya
Ben Eynon
Farzin Mirzaagha
Tony DiBiase
Kong Son
Jackie Cheng
Ellison Chen
Den Wang
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Citations (5)
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