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Jackie Cheng
Jackie Cheng
KLA-Tencor
Engineering
Lithography
Real-time computing
Reticle
Engineering drawing
3
Papers
7
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Implementation of new recticle inspection technology for progressive mask defect detection strategy on memory fab
2008
Andy Lan
Jenny Hsu
Todd T. Shih
Toroy Tien
Jackie Cheng
Mike Yeh
Ellison Chen
David Wu
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Study of chromeless mask quartz defect detection capability for 80-nm post structure
2006
Jerry Lu
Boster Wang
Frank F. Chen
Orion Wang
Jomarch Chou
Orson Lin
Jackie Cheng
Ellison Chen
Paul Yu
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Process window impact of progressive mask defects, its inspection and disposition techniques (go / no-go criteria) via a lithographic detector
2005
Jerry Huang
Lan-Hsin Peng
Chih Wei Chu
Kaustuve Bhattacharyya
Ben Eynon
Farzin Mirzaagha
Tony DiBiase
Kong Son
Jackie Cheng
Ellison Chen
Den Wang
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Citations (5)
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